Improvement of Barrier Anodic Oxide Al2O3 Passivation of Aluminum Alloy for LSI/FPD Plasma Process Equipment

Autor:	Fumikazu Mizutani, Yasuyuki Shirai, Yasuhiro Kasase, Minoru Tahara, Tadahiro Ohmi, Masafumi Kitano
Rok vydání:	2009
Předmět:	Materials science Process equipment chemistry Passivation Aluminium Alloy Metallurgy engineering chemistry.chemical_element Plasma engineering.material Anodic oxide
Zdroj:	ECS Transactions. 16:89-94
ISSN:	1938-6737 1938-5862
Popis:	Barrier type anodic oxides film of the aluminum alloy in nonaqueous electrolyte solution has some excellent characteristics as a passivation film. In electrolyte that used the ethylene glycol as nonaqueous solution, the thickness of the anodic oxides film was able to be formed only up to about 0.3μm. However, the thickness of 0.5μm or more is demanded from the viewpoint of mechanical strength in actual manufacturing equipments. The barrier type anodic oxides film that exceeded 0.5μm was able to be formed by the use of a low dielectric constant glycol system solvent, the viscosity control of the electrolyte and other optimizations. The thick nonaqueous anodic oxides will be put to actual use as the passivation film for the plasma process equipment of the LSI/FPD manufacturing.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::caf6c0a7f8ec75495cb47d620bc61538 https://doi.org/10.1149/1.3091908 Zobrazit plný text záznamu