Tunable and bright EUV sources using the interaction of medium–energy electron beams with periodic multilayer targets

Autor:	C. Bonnelle, Jean-Michel André, B. Pardo
Rok vydání:	2003
Předmět:	Diffraction Physics Nuclear and High Energy Physics business.industry Extreme ultraviolet lithography Physics::Optics Electron Membrane Medium energy Optics Transition radiation Optoelectronics business Instrumentation
Zdroj:	Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 498:532-538
ISSN:	0168-9002
Popis:	We give the design of tunable and bright EUV sources based on the interaction of medium-energy electrons with periodic multilayer targets. The basic phenomon is the Bragg resonant transition radiation occurring when transition radiation is diffracted under the Bragg conditions within a periodic multilayer structure. To achieve the tunability, we propose to use laterally d-graded multilayer, and to obtain bright sources, we propose to associate multilayer targets deposited on thin semitransparent membranes. The typical performances of such sources are calculated by using a recently developed model.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cab641d3b904ee220ba3608059ad71ad https://doi.org/10.1016/s0168-9002(02)02075-2 Zobrazit plný text záznamu Full Text from ScienceDirect