Ferroelectric ZrO2 ultrathin films on silicon for metal-ferroelectric-semiconductor capacitors and transistors
| Autor: | Yu-Sen Jiang, Kuei-Wen Huang, Sheng-Han Yi, Chin-I Wang, Teng-Jan Chang, Wei-Chung Kao, Chun-Yuan Wang, Yu-Tung Yin, Jay Shieh, Miin-Jang Chen |
|---|---|
| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | Journal of the European Ceramic Society. 42:6997-7003 |
| ISSN: | 0955-2219 |
| DOI: | 10.1016/j.jeurceramsoc.2022.07.031 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect