Characterization of Titanium Nitride Thin Films Deposited by Reactive Dc Sputtering

Autor:	Derek Lefcort, Saidjafarzoda Ilhom, Habeeb Mousa, Xinhao Wang, Yangchao Luo, Helena Silva
Rok vydání:	2023
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c8384b79eb31bd35bcec72f9a7b05f34 https://doi.org/10.2139/ssrn.4419940 Zobrazit plný text záznamu