Rare-Earth Plasma Beyond Extreme Ultraviolet (BEUV) Sources at 6.xnm
Autor: | Noboru Yugami, Takeshi Higashiguchi, Takamitsu Otsuka |
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Rok vydání: | 2015 |
Předmět: |
Materials science
Opacity Computer Networks and Communications business.industry Applied Mathematics Energy conversion efficiency General Physics and Astronomy Pulse duration Plasma Viewing angle Kinetic energy Ion Optics Extreme ultraviolet Signal Processing Electrical and Electronic Engineering Atomic physics business |
Zdroj: | Electronics and Communications in Japan. 98:52-58 |
ISSN: | 1942-9533 |
DOI: | 10.1002/ecj.11690 |
Popis: | SUMMARY We have studied self-absorption effects of a laser-produced plasma (LPP) source at 6.x nm as a function of laser pulse duration and viewing angle. The spectral profiles are shown to have a strong dependence on the viewing angle. Absorption effects are less pronounced when a 150-ps pulse duration is used due to reduced opacity resulting from plasma expansion. Conversion efficiencies and ion energies are also measured as a function of laser pulse duration and laser power density. A maximum conversion efficiency of 0.4% within a 0.6% bandwidth was measured, and lower ion kinetic energy was observed. It is concluded that in order to reduce self-absorption effects and ion yields, and increase conversion efficiencies, a short pulse duration should be used. |
Databáze: | OpenAIRE |
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