Microstructure evolution and anti-wear mechanism of Cu film fabricated by magnetron sputtering deposition

Autor:	Yanan Cao, Yanqiu Xia, Baoyu Duan, Wenxiong Mu, Xin Tan, Hao Wu
Rok vydání:	2022
Předmět:	Mechanics of Materials Mechanical Engineering General Materials Science Condensed Matter Physics
Zdroj:	Materials Letters. 315:131941
ISSN:	0167-577X
DOI:	10.1016/j.matlet.2022.131941
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c0508b6c1fcfef7e7c0c7b3f9d181aaf https://doi.org/10.1016/j.matlet.2022.131941 Zobrazit plný text záznamu Full Text from ScienceDirect