Palladium/Silver Multilayers
| Autor: | H. Schotte, M. Saillé, R. Vanden Berghe, A. Van Calster, S. Demolder |
|---|---|
| Rok vydání: | 1991 |
| Předmět: |
Materials science
chemistry.chemical_element Humidity Sem analysis Dielectric Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Reliability (semiconductor) chemistry Test structure Forensic engineering Electrical and Electronic Engineering Composite material Electrical conductor Palladium Voltage |
| Zdroj: | Microelectronics International. 8:16-20 |
| ISSN: | 1356-5362 |
| Popis: | The reliability of thick film multilayer systems, based on palladium‐silver conductors, and obtained from several suppliers, is evaluated. A test structure is presented and the impact of different parameters, such as humidity, temperature, voltage bias and presence of overglaze, on the data is discussed. A SEM analysis of the failed samples allows identification of the failure mechanisms as due to flaws (pinholes and inclusions) in the dielectric. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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