The assessment of some cobalt and cobalt-tellurium complexes for MOCVD applications
| Autor: | Ping Yin, Julian Johnson, Mingzhe Ke, Glen B. Deacon, Ronald Stanley Dickson |
|---|---|
| Rok vydání: | 1996 |
| Předmět: |
Hydrogen
Analytical chemistry chemistry.chemical_element Decomposition Medicinal chemistry Inorganic Chemistry Metal chemistry X-ray photoelectron spectroscopy visual_art Materials Chemistry visual_art.visual_art_medium Metalorganic vapour phase epitaxy Physical and Theoretical Chemistry Tellurium Cobalt |
| Zdroj: | Polyhedron. 15:2237-2245 |
| ISSN: | 0277-5387 |
| DOI: | 10.1016/0277-5387(95)00480-7 |
| Popis: | Eleven cobalt complexes of the types [Co(CO) 2 (NO)L](L = PEt 3 , TeMe 2 or TeEt 2 ) and[(η 3 -C 3 H 3 R 2 )Co(CO) 2 L](R=H or Me; L CO, PEt 3 , TeEt 2 or CNR′ with R′ Pr i , Bu t or Cy; Cy is cyclohexyl) have been prepared and assessed for MOCVD applications. Measurement of vapour pressures by the Knudson effusion method has established that the room-temperature volatilities of [Co(CO) 2 (NO)(TeMe 2 )], and the allyl complexes[(η 3 -C 3 H 5 )Co(CO) 3 ,],[(η 3 -C 3 H 4 Me)Co(CO) 3 ], [(η 3 -C 3 H 3 Me 2 )Co(CO) 3 ] and [(η 3 -C 3 H 5 )Co(CO) 2 (CNBu t )] are sufficient (0.1–4.0 mmHg) to achieve high concentrations in the vapour state. Vapour-phase thermal degradation at 180–250°C of seven complexes carried in a stream of hydrogen gave metal deposits, which were analysed by EDX or XPS. The best behaved complexes were [Co(CO) 2 (NO)(TeMe 2 )] and[(η 3 -C 3 H 5 (Co(CO) 3 ], which gave clean Co films after decomposition at 150 and 250°C, respectively. |
| Databáze: | OpenAIRE |
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