Sub-hundred nanometre pitch measurements using an AFM with differential laser interferometers for designing usable lateral scales
| Autor: | Nahoko Hisata, Satoshi Gonda, Taeho Keem, Ken Enjoji, Hirohisa Fujimoto, Ichiko Misumi, Sunao Aya, Akihiro Fujii, Qiangxian Huang, Hiroaki Sumitani, Takeshi Yamagishi, Tomizo Kurosawa |
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| Rok vydání: | 2005 |
| Předmět: | |
| Zdroj: | Measurement Science and Technology. 16:2080-2090 |
| ISSN: | 1361-6501 0957-0233 |
| Popis: | We have developed a new atomic force microscope with differential laser interferometers (DLI-AFM), carried out test measurements of the prototype 1D-grating standards with pitches of 100, 80, 60 and 50 nm using the DLI-AFM and evaluated the uncertainty in the pitch measurements. In the procedures of the pitch calculation, two types of definitions of the peak positions, 'the centre of gravity method', and 'the zero-crossing method', were compared. The zero-crossing method was adopted in this study since the standard deviation of pitches by the zero-crossing method was smaller than that by the centre of gravity method. The expanded uncertainty (k = 2) was approximately 0.20 nm and was only 0.4% for the nominal pitch of 50 nm. We propose a design of usable 1D-grating standards as certified reference materials. |
| Databáze: | OpenAIRE |
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