Single-mode high frequency LiNbO3 Film Bulk Acoustic Resonator
| Autor: | Aurelio Borzi, Alexandre Reinhardt, Catherine Maeder-Pachurka, Selsabil Sejil, Gregory Enyedi, Denis Mercier, Pierre Perreau, Pauline Sylvia Pokam Kuisseu, Jerome Dechamp, Michael Bertucchi, Gael Castellan, Marc Zussy, Frédéric Mazen, Christophe Billard, Julien Delprato, Marie Bousquet |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science business.industry Lithium niobate Single-mode optical fiber Resonance chemistry.chemical_element 020206 networking & telecommunications 02 engineering and technology Tungsten Antiresonance 01 natural sciences Resonator chemistry.chemical_compound chemistry Q factor 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Optoelectronics business Temperature coefficient |
| Zdroj: | 2019 IEEE International Ultrasonics Symposium (IUS). |
| DOI: | 10.1109/ultsym.2019.8925617 |
| Popis: | In this paper, Y+163°-cut LiNbO 3 (LNO) Film Bulk Acoustic Resonators (FBAR) with patterned bottom electrodes (AlSi or W) and a sacrificial layer cavity have been fabricated using a layer transfer process (4-inch). Unlike previous work based on films oriented towards the X axis [1], the Y+163° orientation provides a single resonance at 2.2 GHz, with an effective electromechanical coupling factor (k t 2) of 26 %. Thanks to this single mode behavior and to the energy trapping induced by the heavy tungsten electrodes, the quality factor at antiresonance (Q a ) is increased to 600. Moreover a Temperature Coefficient of Frequency (TCF) of –45 ppm/°C is obtained. This demonstrates a significant improvement towards introducing LiNbO 3 as an alternative to AlN in Bulk Acoustic Wave (BAW) filters for the new generation of RF filters. |
| Databáze: | OpenAIRE |
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