Low Loss Acoustic Delay Lines Based on Solidly Mounted Lithium Niobate Thin Film
| Autor: | Kuan-Ju Tseng, Ming-Huang Li |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Materials science
business.industry Mechanical Engineering Bandwidth (signal processing) Lithium niobate Insulator (electricity) 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Wavelength chemistry.chemical_compound Transducer chemistry 0103 physical sciences Electrode Optoelectronics Insertion loss Electrical and Electronic Engineering Thin film 0210 nano-technology business 010301 acoustics |
| Zdroj: | Journal of Microelectromechanical Systems. 29:449-451 |
| ISSN: | 1941-0158 1057-7157 |
| DOI: | 10.1109/jmems.2020.2991240 |
| Popis: | In this work, acoustic delay lines (ADLs) based on solidly mounted structures were studied to achieve low insertion loss (IL) and wide fractional bandwidth (FBW). By adopting the guided shear-horizontal wave (SH-wave) in thin-film lithium niobate on insulator (LNOI) configuration, the acoustic energy is constrained near the surface to attain high piezoelectric coupling ( ${K}^{2}$ ) to yield low IL and wide FBW. Proposed ADLs were designed with Au electrodes in X-cut LNOI to obtain sufficient ${K}^{2} > 27$ % up to 1-GHz, thus allowing a better IL-FBW tradeoff. Fabricated prototype ADLs with wavelength ( $\lambda$ ) of $4~\mu \text{m}$ (940 MHz) and $6~\mu \text{m}$ (640 MHz) achieve IL around 10 dB and FBW around 9% simultaneously using conventional bidirectional transducers. Such a performance is comparable to suspended plate wave ADL counterparts while retains enhanced mechanical robustness for batch-manufacturing and packaging. [2020-0057] |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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