Extreme ultraviolet scanner with high numerical aperture: obscuration and wavefront description
| Autor: | Laurens de Winter, Timur Tudorovskiy, Jan van Schoot, Kars Troost, Erwin Stinstra, Stephen Hsu, Toralf Gruner, Juergen Mueller, Ruediger Mack, Bartosz Bilski, Joerg Zimmermann, Paul Graeupner |
|---|---|
| Rok vydání: | 2022 |
| Zdroj: | Journal of Micro/Nanopatterning, Materials, and Metrology. 21 |
| ISSN: | 2708-8340 |
| DOI: | 10.1117/1.jmm.21.2.023801 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|