Privacy-preserving Amalgamated Machine Learning for Virtual Metrology

Autor:	Thomas J. Ashby, Anastasiia Doinychko, Andres Torres, Daniele Pagano, Wilfried Verachtert, Roel Wuyts
Rok vydání:	2023
Zdroj:	2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
DOI:	10.1109/asmc57536.2023.10121077
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b584df9ddf1e06448376635578da42a1 https://doi.org/10.1109/asmc57536.2023.10121077 Zobrazit plný text záznamu