Silicon-based Ultimate Miniature Magnetic Inductors Technology for High-efficiency DC-DC Conversion
| Autor: | Lothar Lehmann, Marcel Wieland, Lawrence Selvaraj, Zishan Ali, Lulu Peng, Nur Aziz Yosokumoro, Chor Shu Cheng, Patrick Rohlfs, Yong Chau Ng |
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| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Materials science business.industry 020208 electrical & electronic engineering Energy conversion efficiency 02 engineering and technology Inductor 01 natural sciences Inductance Magnetic core Saturation current Electromagnetic coil Q factor 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Optoelectronics business Electrical efficiency |
| Zdroj: | 2020 32nd International Symposium on Power Semiconductor Devices and ICs (ISPSD). |
| DOI: | 10.1109/ispsd46842.2020.9170162 |
| Popis: | This paper presents the development of high frequency (>10MHz) silicon-based thin-film magnetic-core inductors for DC-DC converter applications with high conversion efficiency. These inductors were fabricated with far-BEOL compatible process on 300 mm wafers. With an improved laminated thinfilm magnetic core and thick electro-plated Cu windings, these inductors achieved a wide range of inductance ranging from 10 to 250nH, a high Q factor of up to 17, and a saturation current of up to 650 mA in a small area of 1mm2. These inductor properties translate to more than 90% inductor power efficiency in a multiple-phased 3.6V-to-1V DC-DC converter within a current range of 0.1A to 1A. |
| Databáze: | OpenAIRE |
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