Toward spirometry-on-chip: design, implementation and experimental results
| Autor: | Bahareh Gholamzadeh, Falah Awwad, Sebastian Magierowski, Mohamad Sawan, Martin Matynia, Parastoo Baghaei Raveri, Giancarlo Ayala-Charca, Ebrahim Ghafar-Zadeh |
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| Rok vydání: | 2016 |
| Předmět: |
Microelectromechanical systems
Engineering Cantilever business.industry Semiconductor chip Capacitive sensing 020208 electrical & electronic engineering Airflow 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics Electronic Optical and Magnetic Materials Low complexity Hardware and Architecture Deflection (engineering) Hardware_INTEGRATEDCIRCUITS 0202 electrical engineering electronic engineering information engineering Electronic engineering Electrical and Electronic Engineering 0210 nano-technology business Respiratory health Simulation |
| Zdroj: | Microsystem Technologies. 23:4591-4598 |
| ISSN: | 1432-1858 0946-7076 |
| DOI: | 10.1007/s00542-016-3200-0 |
| Popis: | This paper presents a new approach towards the development of a spirometer-on-chip device for point-of-care diagnostics. The proposed device consists of a cantilever based airflow sensor fabricated through a multi-user MEMS process. The deflection of each cantilever beam is measured using capacitive electrodes integrated on a single semiconductor chip. These electrodes are connected to an off-chip custom-made readout interface circuit for the measurement of minute capacitive changes and for the acquisition of data into a computer. Herein, we discuss and demonstrate the characterization results of such a system using a low complexity air-based technique. Additionally, we demonstrate the applicability of these devices for spirometry on breathing tests of human subjects. Based on these results, the proposed spirometer-on-chip shows significant promise for use as a mobile portable system for continuous health assessment of respiratory health. |
| Databáze: | OpenAIRE |
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