Influence of Intercell Trapped Charge on Vertical NAND Flash Memory

Autor: Byungin Lee, Hyun-Seung Yoo, Sung-Kye Park, Yong Jun Kim, Gyu-Seog Cho, Hyug Su Kwon, Woo Young Choi, SangMoo Choi
Rok vydání: 2017
Předmět:
Zdroj: IEEE Electron Device Letters. 38:164-167
ISSN: 1558-0563
0741-3106
DOI: 10.1109/led.2016.2643278
Popis: The influence of intercell trapped charge (ITC)-the charge trapped at the inter-cell nitride regions by fringe electric fields during program and erase operations-on vertical NAND (VNAND) flash memory is investigated. In addition to conventional degradation mechanisms such as tunnel oxide damage, ITC deteriorates the transconductance and read current of VNAND flash memory cells. The influence of ITC-induced degradation on VNAND flash memory is discussed, using both simulation and experimental results. A solution for ITC suppression is also proposed: the use of low-k intercell regions.
Databáze: OpenAIRE