| Autor: |
Dmitriy Nasimov, Dmitriy Sheglov, Aleksandr Latyshev |
| Rok vydání: |
2009 |
| Zdroj: |
Siberian Journal of Physics. 4:47-55 |
| ISSN: |
1818-7994 |
| DOI: |
10.54362/1818-7919-2009-4-1-47-55 |
| Popis: |
To ensure uniformity of measurements in nanotechnology test-object have been developed. It provide precise calibration of z-coordinates of the atomic force microscope in the sub-and nanometer bands with an accuracy of 0.05 nm on the basis of a system of atomic steps, one interplanar distance in height, at the vicinal surface of silicon. Extremely high precision of the test-object is provided by comparing its values with the atomic lattice parameter of the perfect crystal. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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