Integration of piezoelectric tunable capacitors and bonded-wire inductors for contactless RF switch and tunable filter
| Autor: | Shih Jui Chen, Chuang Yuan Lee, Eun Sok Kim |
|---|---|
| Rok vydání: | 2011 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Metals and Alloys Electrical engineering Condensed Matter Physics Inductor Capacitance Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Capacitor RF switch law Variable capacitor Insertion loss Radio frequency Electrical and Electronic Engineering business Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 165:73-78 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2009.12.026 |
| Popis: | This paper presents the design, fabrication, and characterization of a contactless radio frequency (RF) microelectromechanical system (MEMS) switch, composed of two surface-micromachined piezoelectric tunable capacitors and two bonded-wire inductors. The measured insertion loss and power isolation of the fabricated switch are 2.2 and 10.1 dB, respectively, with a capacitance variation of 4:1 over a narrow bandwidth near 2.2 GHz. This novel approach of using inductors eases the deflection requirement for the deformable bridge of the variable capacitor, and allows piezoelectric ZnO film to be used to deflect the capacitor bridge to vary the air gap, thus yielding a contactless RF switch. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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