| Autor: |
Henry Guckel, S. Massoud-Ansari, P.S. Mangat, J. Klein |
| Rok vydání: |
2002 |
| Předmět: |
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| Zdroj: |
Proceedings of Ninth International Workshop on Micro Electromechanical Systems. |
| DOI: |
10.1109/memsys.1996.493995 |
| Popis: |
Design and fabrication of an electrostatic vertical actuator is reported. This actuator has been constructed using a multi-level, LIGA-like process. The process uses diamond lapping and polishing for replanarization of electroplated surfaces after the first LIGA cycle. This allows a second layer of photoresist to be bonded to the surface and therefore a second LIGA cycle can follow. In this actuator, force outputs in the milli-Newton range, and a vertical displacement of hundreds of microns appear to be feasible. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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