Determination of Changes in Workfunction of Carbon Nanotubes by Auger Electron Spectroscopy after Deposition of thin Hafnium Oxide by ALD

Autor:	M.V. Shibalov, E.A. Pershina, K.I. Litvinova, V.S. Belov, A.P. Sirotina, E. P. Kirilenko, E.V. Zenova, A.M. Tagachenkov, M.S. Molodensky
Rok vydání:	2019
Předmět:	Auger electron spectroscopy Materials science Chemical engineering Control and Systems Engineering law Carbon nanotube Electrical and Electronic Engineering Deposition (chemistry) law.invention Hafnium oxide
Zdroj:	Nano- i Mikrosistemnaya Tehnika. 21:465-471
ISSN:	1813-8586
DOI:	10.17587/nmst.21.465-471
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::afda55429e3f6ff22d5bff7ea0cafb4b https://doi.org/10.17587/nmst.21.465-471 Zobrazit plný text záznamu