Deep Learning for Predicting CD-SEMS of NEMS Devices
| Autor: | Benyamin Davaji, Peter A Cook, Bahar Kor, Ziwang Luo, Jiaxian Chen, Jeremy Clark, Garry Bordonaro, Vincent Genova, Marco Heuser, Steve Ayres, Christopher K Ober, Peter C Doerschuk, Amit Lal |
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| Rok vydání: | 2022 |
| Zdroj: | 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS). |
| Databáze: | OpenAIRE |
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