Structural properties and sensing performances of CoN O ceramic films for EGFET pH sensors
| Autor: | Chih-Wei Wang, Tung-Ming Pan |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
010302 applied physics
Diffraction Materials science Process Chemistry and Technology Analytical chemistry chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Oxygen Surfaces Coatings and Films Electronic Optical and Magnetic Materials Volumetric flow rate Amorphous solid Hysteresis chemistry X-ray photoelectron spectroscopy Sputtering visual_art 0103 physical sciences Materials Chemistry Ceramics and Composites visual_art.visual_art_medium Ceramic 0210 nano-technology |
| Zdroj: | Ceramics International. 47:25440-25448 |
| ISSN: | 0272-8842 |
| DOI: | 10.1016/j.ceramint.2021.05.266 |
| Popis: | This paper describes the impact of both Ar/N2 flow rate and rapid thermal annealing (RTA) on the structural properties and sensing characteristics of CoNxOy ceramic films formed through reactive sputtering and then used in extended-gate field-effect transistor (EGFET) pH sensors. The CoNxOy ceramic films were prepared under three different Ar/N2 flow rates (20/5, 20/10, and 20/15) and then annealed at three different RTA temperatures (200, 300, and 400 °C). X-ray diffraction revealed that all of the CoNxOy ceramic films featured amorphous structures. X-ray photoelectron spectroscopy demonstrated that the Co3+ content of the CoNxOy film prepared at the 20/10 flow rate was higher than those of the films prepared at the other flow rates. Atomic force microscopy indicated that the surface roughnesses of the CoNxOy films obtained at flow rates of 20/10 and 20/15 were higher than that of the film prepared at 20/5. High pH-sensitivity (64.36 mV/pH), a small drift rate (0.27 mV/h), and a low hysteresis voltage (1.4 mV) were achieved for the CoNxOy EGFET sensor that had been fabricated at a flow rate of 20/10 with subsequent RTA at 300 °C. This high performance was due to its CoNxOy film having a rough surface, a high Co3+ ion content, and a low number of oxygen vacancies or defects. |
| Databáze: | OpenAIRE |
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