Infrared absorption of Ge epitaxial films on a GaAs substrate
| Autor: | J. Dunkel, C. W. Roberts, W. Y. Han, J. C. Bean, L. Peticolas, Madan Dubey, L. C. West, Kenneth A. Jones |
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| Rok vydání: | 1996 |
| Předmět: | |
| Zdroj: | Journal of Applied Physics. 79:7157-7160 |
| ISSN: | 1089-7550 0021-8979 |
| DOI: | 10.1063/1.361486 |
| Popis: | Germanium films were deposited on GaAs (100) substrates with or without an epiready surface oxide at temperatures between room temperature (RT) and 500 °C using an ultrahigh‐vacuum e‐beam deposition system. The film at 100 °C on a substrate with a surface oxide had a flat absorption curve over the wave‐number range investigated, 500–4000 cm−1, with an absorption of less than 10/cm at 1000 cm−1 (10 μm wavelength). Films deposited at RT and 50 °C on substrates with a surface oxide had comparable low absorption, but they contained an absorption peak at 830 cm−1 associated with the Ge—O bonds. Although all three films were amorphous, the films deposited at the lower temperatures were more porous. This enabled oxygen to percolate in from the atmosphere to form the Ge—O bonds. The films deposited at 150 °C and above on substrates with a surface oxide and at 100 °C with the surface oxide removed thermally in situ prior to deposition the Ge films, and the single crystal films deposited at 400 and 500 °C on oxide‐... |
| Databáze: | OpenAIRE |
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