RECOMBINATION AND DIFFUSION IN AN INDUCTIVELY COUPLED ARGON PLASMA DURING POWER INTERRUPTION
| Autor: | Joost J. A. M. van der Mullen, J. M. de Regt, J. Jonkers, F. P. J. de Groote |
|---|---|
| Rok vydání: | 2023 |
| Zdroj: | Proceeding of Progress in Plasma Processing of Materials 1997. |
| DOI: | 10.1615/itppc-1996.210 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|