Ion irradiation effects on SrCeO3 thin films

Autor:	Tetsuo Shimura, Mareo Ishigame, Noriaki Matsunami, Hiroyasu Iwahara, N Sata
Rok vydání:	2002
Předmět:	Nuclear and High Energy Physics Proton Physics::Instrumentation and Detectors Chemistry Analytical chemistry Elastic collision Ion Condensed Matter::Materials Science Physics::Plasma Physics Sputtering Yield (chemistry) Irradiation Atomic physics Thin film Instrumentation Stoichiometry
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 194:443-450
ISSN:	0168-583X
Popis:	Ion irradiation effects on a proton conductive oxide, i.e. SrCe0.95Yb0.05O3−δ (SCO) have been investigated by measurements of sputtering yield, modifications of compositions and structure. The sputtering yields of SCO by 100 keV Ar+ and Ne+ are determined as 1.6 and 0.55 atoms per ion, respectively. The compositions remain nearly stoichiometric under ion irradiation. The experimental sputtering yields are compared with those of computer simulations based on the elastic-collision cascade and the surface-binding energies for sputtering, dependent on the simulation version, are deduced. These values are compared with those derived from the thermodynamic properties. The elastic collisions appear to be dominant.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a8ee75a4a277cc0f8299e44be7152fec https://doi.org/10.1016/s0168-583x(02)00785-1 Zobrazit plný text záznamu Full Text from ScienceDirect