| Autor: |
Masanobu Higashide, Naru Ishii, Hironobu Kawamura, Ken Nishina |
| Rok vydání: |
2012 |
| Předmět: |
|
| Zdroj: |
Frontiers in Statistical Quality Control 10 ISBN: 9783790828450 |
| DOI: |
10.1007/978-3-7908-2846-7_8 |
| Popis: |
This paper is developed from Higashide et al. (Front Stat Qual Control 9:71–84, 2010). Automatic process control (APC) is frequently used in the semiconductor manufacturing process; however, statistical process control (SPC) is also needed to control the APC controller. This is an earlier paradigm on the integration of SPC and APC. Our viewpoint is different from the earlier one as follows: (a) APC reinforces SPC. (b) SPC complements APC. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
