Improved Measurement of Carbon in Poly- and CZ Crystal Silicon by Means of Low Temperature FTIR

Autor:	Roberto Scala, Ivo Crössmann, M.G. Pretto, Reinhard Wolf, M. Porrini
Rok vydání:	2005
Předmět:	Crystal Materials science chemistry Silicon Analytical chemistry chemistry.chemical_element Infrared spectroscopy General Materials Science Fourier transform infrared spectroscopy Condensed Matter Physics Carbon Atomic and Molecular Physics and Optics Fourier transform spectroscopy
Zdroj:	Solid State Phenomena. :591-596
ISSN:	1662-9779
DOI:	10.4028/www.scientific.net/ssp.108-109.591
Popis:	This work proposes some improvements over the current state-of-the-art of carbon measurement in silicon by means of Fourier Transform Infrared Spectroscopy (FTIR) at low temperature (77 K), as described in the ASTM F1391-93 (2000) standard method.
Databáze:	OpenAIRE
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