Static AMHS Simulation Based on Planned Product Mixes
| Autor: | Christian Hammel, Christian Schubert, Robert Schmaler |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
0209 industrial biotechnology
Computer science Semiconductor device fabrication Scheduling (production processes) 02 engineering and technology Track (rail transport) Manufacturing engineering Product (business) 020901 industrial engineering & automation 0202 electrical engineering electronic engineering information engineering Production (economics) 020201 artificial intelligence & image processing Material handling Throughput (business) Simulation based |
| Zdroj: | WSC |
| DOI: | 10.1109/wsc48552.2020.9383907 |
| Popis: | Automated material handling systems (AMHS) in semiconductor fabrication plants (Fabs) are crucial to achieving a high production throughput. When upgrading an existing or planning a new Fab, production plans are used to decide on the required toolset. But what about AMHS planning? To our knowledge no method exists, given an anticipated product mix, that generates reliable transport patterns including non-productive transports. This paper outlines a methodology to generate such transport patterns, including non-productive transports for test wafers, empty FOUPs, and others. The prediction is based on a preliminary product mix supplemented with scheduling rules and AMHS characteristics, yielding deeper insight into actual AMHS capabilities and constraints during the planning phase. The results are used as input to a Static Simulation which will create a forecast on track utilization for a given layout in which possible AMHS bottlenecks are highlighted. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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