Ta thickness-dependent perpendicular magnetic anisotropy features in Ta/CoFeB/MgO/W free layer stacks
| Autor: | Jin Pyo Hong, Jae Hong Kim, Seungmo Yang, JaBin Lee, GwangGuk An, WooSeong Chung |
|---|---|
| Rok vydání: | 2015 |
| Předmět: |
Thickness dependent
Materials science Condensed matter physics Perpendicular magnetic anisotropy Annealing (metallurgy) Metals and Alloys Surfaces and Interfaces Surfaces Coatings and Films Electronic Optical and Magnetic Materials Condensed Matter::Materials Science Nuclear magnetic resonance X-ray photoelectron spectroscopy Materials Chemistry Thermal stability |
| Zdroj: | Thin Solid Films. 587:39-42 |
| ISSN: | 0040-6090 |
| Popis: | We describe Ta underlayer thickness influence on thermal stability of perpendicular magnetic anisotropy in Ta/CoFeB/MgO/W stacks. It is believed that thermal stability based on Ta underlay is associated with thermally-activated Ta atom diffusion during annealing. The difference in Ta thickness-dependent diffusion behaviors was confirmed with X-ray photoelectron spectroscopy analysis. Along with a feasible Ta thickness model, our observations suggest that an appropriate seed layer choice is needed for high temperature annealing stability, a critical issue in the memory industry. |
| Databáze: | OpenAIRE |
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