Stacked, Standing Wave Detectors in 3D SOI-CMOS
| Autor: | F. Tejada, A.G. Andreou, P.O. Pouliquen |
|---|---|
| Rok vydání: | 2006 |
| Předmět: |
Physics
Physics::Instrumentation and Detectors business.industry Amplifier Detector Photodetector Hardware_PERFORMANCEANDRELIABILITY Computer Science::Other Photodiode law.invention Standing wave Computer Science::Hardware Architecture Interferometry CMOS law Hardware_INTEGRATEDCIRCUITS Astronomical interferometer Electronic engineering Optoelectronics business |
| Zdroj: | ISCAS |
| DOI: | 10.1109/iscas.2006.1692835 |
| Popis: | We report on the design of stacked standing wave detectors in a 3D SOI CMOS technology. The standing wave detector is the basic block needed to implement a die level CMOS interferometer to measure small displacements. The 3D CMOS process allows for standing wave detectors to be vertically stacked which provides directional information as well as displacement information from the interferometer. We discuss design considerations for the photodiodes and MOS amplifier. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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