Dramatically enhanced mechanical properties of diamond-like carbon films on polymer substrate for flexible display devices via argon plasma pretreatment
| Autor: | Jen Ai Lee, Albert Yin Tung Sun, Chii-Ruey Lin, Chi Wen Liu, Po Chuan Pan |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
010304 chemical physics
Chemistry Material properties of diamond General Physics and Astronomy Biasing engineering.material 010402 general chemistry 01 natural sciences 0104 chemical sciences Carbon film Coating Chemical engineering Sputtering 0103 physical sciences engineering Polymer substrate Physical and Theoretical Chemistry Nanodiamond Polyimide |
| Zdroj: | Chemical Physics. 529:110551 |
| ISSN: | 0301-0104 |
| DOI: | 10.1016/j.chemphys.2019.110551 |
| Popis: | Hydrogen-free diamond-like carbon (DLC) films have been deposited on polyimide (PI) substrate at room temperature using the sputtering with a novel nanodiamond target. Also, argon plasma pretreatment procedure for PI substrate was optimized to improve the adhesion and characteristics of the as-prepared DLC film. The deposited DLC film on the PI substrate pretreated with −400 V of bias voltage was found to possess the highest sp3 bonding fraction of 53%, the pencil hardness of 3H, and the optical transmittance of 82%, respectively. The research work demonstrates prosperous applications of DLC films in the protective coating for commercialized optoelectronic devices. |
| Databáze: | OpenAIRE |
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