Obtainment of Stabilized Zirconium Dioxide via the High-Frequency Magnetron Sputtering of a Metallic Target
| Autor: | O. V. Stognei, M. S. Filatov, S. G. Valyukhov |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Zirconium Materials science Argon Zirconium dioxide Analytical chemistry chemistry.chemical_element 02 engineering and technology Yttrium Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences Surfaces Coatings and Films Tetragonal crystal system chemistry.chemical_compound chemistry 0103 physical sciences Thin film 0210 nano-technology Solid solution |
| Zdroj: | Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 12:1159-1164 |
| ISSN: | 1819-7094 1027-4510 |
| Popis: | The influence of the yttrium concentration on the structure of coatings prepared via the high-frequency magnetron sputtering of a metal target is investigated. The results of coating deposition in pure argon and a mixed (Ar + O2), reactive medium are discussed. It is demonstrated that a nonequilibrium body-centered-cubic solid solution based on zirconium with an extended homogeneous region (up to 16 at % Y) is formed under the condition that a target is sputtered in pure argon. During reactive-coating deposition, the formation of cubic or tetragonal zirconium dioxide is generated depending on the yttrium concentration. The tetragonal structure is created if the yttrium concentration is 8 at %. It is found that the obtained tetragonal zirconium dioxide is thermally stable both in terms of structure and in morphology upon heat treatment in air at 1100°C for 11 h. |
| Databáze: | OpenAIRE |
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