A Jumping Silicon Microrobot with Electrostatic Inchworm Motors and Energy Storing Substrate Springs
| Autor: | Joseph T. Greenspun, Craig B. Schindler, Hani C. Gomez, Kristofer S. J. Pister |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
Microelectromechanical systems
0209 industrial biotechnology Materials science Silicon business.industry Silicon on insulator chemistry.chemical_element 02 engineering and technology Substrate (electronics) 021001 nanoscience & nanotechnology 020901 industrial engineering & automation chemistry Optoelectronics 0210 nano-technology business Layer (electronics) Energy (signal processing) Mechanical energy |
| Zdroj: | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). |
| DOI: | 10.1109/transducers.2019.8808463 |
| Popis: | We present the first demonstration of a silicon microrobot using electrostatic inchworm motors to store mechanical energy in springs etched into the silicon substrate. The microrobot is fabricated using a two mask silicon on insulator MEMS process with a 40µm device layer and 550µm substrate. The springs in the silicon substrate can store 100µJ of energy, more than 10X greater than what has been demonstrated previously using energy storing springs in the silicon on insulator layer. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|