Reclamation of used SiC grinding powder and its sintering characteristics

Autor: Shoichi Kume, Koji Watari, Ningfeng Gao, Hideaki Itoh, Sasai Ryo, Yukari Ando
Rok vydání: 2006
Předmět:
Zdroj: Journal of the European Ceramic Society. 26:837-842
ISSN: 0955-2219
DOI: 10.1016/j.jeurceramsoc.2005.06.015
Popis: A process of recycling used abrasive SiC powder after grinding Si wafer was proposed to raw powder for sintering. The used SiC powder could be successfully converted to composite powders consisting of SiC particle and Si 3 N 4 whisker via a heat treatment in N 2 atmosphere, in which iron oxide acted as a catalyst in the vapor–liquid–solid (VLS) formation of Si 3 N 4 . With the addition of 3 mass% Al 2 O 3 and 1 mass% Y 2 O 3 , the composite powders sintered at 1900 °C for 2 h exhibited a 3-point bending strength of 626 ± 48 MPa and a fracture toughness of 3.9 ± 0.1 MPa m 1/2 , which were significantly enhanced as compared with those of using recovered powder merely composed of SiC particle. The strength and fracture toughness of the sintered material could be improved by optimization of chemical and heat treatment parameters and controlling the amount of sintering additives and hot pressing conditions.
Databáze: OpenAIRE