A test object with a line width less than 10 nm for scanning electron microscopy
| Autor: | A. V. Rakov, Yu. A. Novikov, Yu. V. Ozerin, M. A. Danilova, P. A. Todua, V. B. Mityukhlyaev |
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| Rok vydání: | 2008 |
| Předmět: |
Physics
Conventional transmission electron microscope Scanning electron microscope business.industry Applied Mathematics Scanning confocal electron microscopy Optics Electron tomography Scanning transmission electron microscopy Scanning ion-conductance microscopy business Projection (set theory) Instrumentation Environmental scanning electron microscope |
| Zdroj: | Measurement Techniques. 51:839-843 |
| ISSN: | 1573-8906 0543-1972 |
| Popis: | Data are given on the test object for scanning electron microscopy in which the components (ridges) are of trapezoidal profile and have large angles of inclination for the side walls. The width of the top surface of a projection is less than 10 nm. Methods have been developed for measuring such dimensions of test objects on standard scanning electron microscopes. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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