Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes
| Autor: | Yunhan Chen, Thomas W. Kenny, Anne L. Alter, Ian B. Flader, Dongsuk D. Shin |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Mechanical Engineering 02 engineering and technology Dissipation 021001 nanoscience & nanotechnology 01 natural sciences Temperature measurement Resonator Thermoelastic damping Quality (physics) Amplitude Q factor 0103 physical sciences Optoelectronics Electrical and Electronic Engineering 0210 nano-technology business 010301 acoustics |
| Zdroj: | Journal of Microelectromechanical Systems. 29:1118-1120 |
| ISSN: | 1941-0158 1057-7157 |
| DOI: | 10.1109/jmems.2020.3005323 |
| Popis: | In this paper, we observe amplitude-dependent nonlinear dissipation in experimental measurements of the quality factor (Q). The ringdown response is used to quantify the magnitude of the amplitude-dependent effect in both polysilicon and single crystal silicon (SCS). The Q is reduced in both materials, up to 15.6%, and has a stronger influence on the measurements of Q in polysilicon than in SCS. Since the measured limiting dissipation mechanism in these resonators is thermoelastic dissipation (TED), we suggest these results align with models of amplitude-dependent TED. [2020-0160] |
| Databáze: | OpenAIRE |
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