Atomic layer deposition of ZnO layers on Bi2Te3 powders: Comparison of gas fluidization and rotary reactors

Autor:	Myeong Jun Jung, Myeongjun Ji, Jeong Hwan Han, Young-In Lee, Sung-Tag Oh, Min Hwan Lee, Byung Joon Choi
Rok vydání:	2022
Předmět:	Process Chemistry and Technology Materials Chemistry Ceramics and Composites Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Ceramics International. 48:36773-36780
ISSN:	0272-8842
DOI:	10.1016/j.ceramint.2022.08.241
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::92538f0b005b748116e4d7860fae66e4 https://doi.org/10.1016/j.ceramint.2022.08.241 Zobrazit plný text záznamu Full Text from ScienceDirect