Nanoscale oxidation of zirconium surfaces: Kinetics and mechanisms

Autor:	G. Zhang, Rex D. Ramsier, J. A. Dagata, N. Farkas, Edward A. Evans
Rok vydání:	2003
Předmět:	Zirconium Materials science Anodizing Oxide chemistry.chemical_element Humidity Nanotechnology Surfaces and Interfaces Zirconium nitride Substrate (electronics) Condensed Matter Physics Surfaces Coatings and Films chemistry.chemical_compound Nanolithography chemistry Chemical engineering Thin film
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 21:1188-1193
ISSN:	1520-8559 0734-2101
DOI:	10.1116/1.1560712
Popis:	We show that atomic force microscope-induced oxide features can be formed reproducibly on both Zr and ZrN surfaces, and that the growth rate decreases rapidly with increasing time. There is an increase in oxide-feature height with humidity for both systems, and an approximately linear dependence of the height of the structures on the applied voltage for all films for short exposure times. As the anodization time increases, only the thinnest (6 nm) films show a large enhancement in oxide-feature height, demonstrating the role of the film/substrate interface. Under the same conditions, the height of features grown on ZrN films is greater than for those grown on Zr films, indicating that nitrogen plays a role in the oxidation process.
Databáze:	OpenAIRE
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