Advanced laser processing and its optimization with machine learning
Autor: | Andreas Michalowski, Alexander Ilin, Alexander Kroschel, Stephanie Karg, Peter Stritt, Adina Dais, Sebastian Becker, Gerhard Kunz, Steffen Sonntag, Martin Lustfeld, Petru Tighineanu, Volkher Onuseit, Michael Haas, Thomas Graf, Heiko Ridderbusch |
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Rok vydání: | 2023 |
Zdroj: | Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII. |
DOI: | 10.1117/12.2653604 |
Databáze: | OpenAIRE |
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