Simulation research of illumination system with coherent noise suppression

Autor:	Xianhao Qi, Sen Han, Linghua Zhang, Xianyu Wu, Jun Cheng, Erhui Qi, Haixiang Hu
Rok vydání:	2022
Zdroj:	Optical Metrology and Inspection for Industrial Applications IX.
DOI:	10.1117/12.2642907
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::911209da74bc41210d35ae9af92aefac https://doi.org/10.1117/12.2642907 Zobrazit plný text záznamu