Effects of Atmosphere and Temperature on Microtribology between Silicon Single Crystals

Autor:	Hiroyasu Saka, Makoto Takagi, Hiroyuki Iwata, Ryosuke Kiuchi, Kosuke Nagae
Rok vydání:	2020
Předmět:	Atmosphere Materials science Silicon chemistry Chemical engineering Mechanics of Materials Materials Chemistry Metals and Alloys chemistry.chemical_element Condensed Matter Physics
Zdroj:	Journal of the Japan Institute of Metals and Materials. 84:304-309
ISSN:	2433-7501 0021-4876
DOI:	10.2320/jinstmet.j2020014
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::90a61c7e7b0b06d1c701f19dc7e15e5e https://doi.org/10.2320/jinstmet.j2020014 Zobrazit plný text záznamu