Comparison of different emitter diffusion methods for MINP solar cells: Thermal diffusion and RTP
| Autor: | G. Ebest, Armand Beyer, M. Rennau, Axel Mrwa |
|---|---|
| Rok vydání: | 2000 |
| Předmět: |
Passivation
Renewable Energy Sustainability and the Environment Oxide Analytical chemistry Thermal diffusivity Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention chemistry.chemical_compound chemistry Diffusion process Rapid thermal processing law Thermal Solar cell Common emitter |
| Zdroj: | Solar Energy Materials and Solar Cells. 61:127-134 |
| ISSN: | 0927-0248 |
| DOI: | 10.1016/s0927-0248(99)00105-1 |
| Popis: | A solar cell technology with an extremely small thermal budget was developed for MINP cells. MINP solar cells with efficiencies of up to 15.3% have been achieved by rapid thermal processing (RTP). An emitter diffusion process was simulated and developed that yields a doping profile with a tunnelling oxide in a single furnace step. The P concentration profile was investigated by SIMS measurements and compared to the calculated profile. The SIMS results of the 850°C processing temperature differ from the calculated profile, but the 800°C values showed an excellent conformity. The surface passivation can be improved by an increase of the deposition temperature of the antireflection film. The maximum temperature was appointed with 400°C for MINP and 300°C for pn cells. In comparison with pn cells the temperature stability of MINP cells is significantly higher. |
| Databáze: | OpenAIRE |
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