| Popis: |
This study proposes a micromachined electrochemical angular accelerometer based on interdigital electrodes, with the ability to measure low-frequency angular acceleration. In this paper, the design, fabrication, and characterization of the angular accelerometer were included, with a sensitivity of 100 V/(rad/s2) at 0.01Hz. Compared with commercial sensors, the micro sensor presented in this study has the characteristics of a simple electrode structure and manufacturing process, which may provide a new perspective for mass fabrication and further used in seismic monitoring. |
