Influence of the cleaning method on the quality of preparation of surfaces of optical components
| Autor: | Yu. S. Aleshina, D. Yu. Kruchinin, E. P. Farafontova |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
Materials science
business.industry Applied Mathematics media_common.quotation_subject General Engineering Surface finish Atomic and Molecular Physics and Optics law.invention Computational Mathematics Cleanroom Surface preparation law Quality (business) Photolithography Process engineering business Silicate glass media_common |
| Zdroj: | Journal of Optical Technology. 88:406 |
| ISSN: | 1070-9762 |
| Popis: | The problems related to the cleaning procedure (surface preparation) of optical components at production facilities are discussed. Many of the considered methods are outdated and do not comply with the requirements of technological procedures performed in cleanrooms. We establish that hydromechanical cleaning makes it possible to obtain surfaces of optical components with hydrophilic properties, and this method can be applied in cleanrooms for manufacturing components with the 0th surface finish class of polished surfaces. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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