Self-Referenced Temperature Sensors Based on Cascaded Silicon Ring Resonator
| Autor: | Xiantao Zhu, Minmin You, Zude Lin, Bin Yang, Jingquan Liu |
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| Rok vydání: | 2023 |
| Zdroj: | 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). |
| Databáze: | OpenAIRE |
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