Effects of thickness scaling on the dielectric properties of Hf0.5Zr0.5O2 ferroelectric thin films

Autor:	Puqi Hao, Huashan Li, Binjian Zeng, Qijun Yang, Tianqi Tang, Shuaizhi Zheng, Qiangxiang Peng, Jiajia Liao, Sirui Zhang, Yichun Zhou, Min Liao
Rok vydání:	2023
Předmět:	Electrical and Electronic Engineering Condensed Matter Physics Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Journal of Materials Science: Materials in Electronics. 34
ISSN:	1573-482X 0957-4522
DOI:	10.1007/s10854-023-10497-5
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::867aad350dfff6c08b7cc1200aed7596 https://doi.org/10.1007/s10854-023-10497-5 Zobrazit plný text záznamu Full text from SpringerLink