High bandwidth nano-positioner: A robust control approach

Autor:	Jason Cleveland, Murti V. Salapaka, Srinivasa M. Salapaka, Abu Sebastian
Rok vydání:	2002
Předmět:	Nonlinear system Frequency response Computer science law Linear variable differential transformer Electronic engineering Robust control Optimal control Actuator Transformer Instrumentation Transfer function law.invention
Zdroj:	Review of Scientific Instruments. 73:3232-3241
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1499533
Popis:	This article presents the design, identification, and control of a nano-positioning device suited to image biological samples as part of an atomic force microscope. The device is actuated by a piezoelectric stack and its motion is sensed by a linear variable differential transformer. It is demonstrated that the conventional proportional-integral control architecture does not meet the bandwidth requirements for positioning. The design and implementation of an H∞ controller demonstrates substantial improvements in the positioning speed and precision, while eliminating the undesirable nonlinear effects of the actuator. The characterization of the resulting device in terms of bandwidth, resolution, and repeatability provided illustrates the effectiveness of the modern robust control paradigm.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::84cba0a72293124520adf84c85fe337d https://doi.org/10.1063/1.1499533 Zobrazit plný text záznamu