Molecular Dynamics Simulation for Intrinsic Stress Caused by Surface Oxidation on Hydrogenated Amorphous Silicon
| Autor: | Asuka Hatano, Shunsuke Imaizumi, Sachiyo Ito, So Takamoto, Satoshi Izumi, Reiko Saito, Yohei Tamura |
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| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Amorphous silicon Materials science Mechanical Engineering 02 engineering and technology Condensed Matter Physics 01 natural sciences Stress (mechanics) chemistry.chemical_compound Molecular dynamics 020303 mechanical engineering & transports 0203 mechanical engineering chemistry Chemical engineering Mechanics of Materials 0103 physical sciences General Materials Science Surface oxidation |
| Zdroj: | Journal of the Society of Materials Science, Japan. 66:950-956 |
| ISSN: | 1880-7488 0514-5163 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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