Electrical characterisation of PZT on rapid thermally annealed ruthenium oxide electrodes
| Autor: | D. S. McIntyre, V. Chivukula, L. Weaver, Michael Sayer, E. M. Griswold |
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| Rok vydání: | 1995 |
| Předmět: |
Materials science
Substrate (electronics) Dielectric Condensed Matter Physics Ferroelectricity Ruthenium oxide Electronic Optical and Magnetic Materials Control and Systems Engineering Sputtering Electrode Materials Chemistry Ceramics and Composites Electrical and Electronic Engineering Thin film Composite material Sol-gel |
| Zdroj: | Integrated Ferroelectrics. 10:301-308 |
| ISSN: | 1607-8489 1058-4587 |
| DOI: | 10.1080/10584589508012287 |
| Popis: | The ferroelectric and dielectric properties of sol gel thin film PZT are affected by the physical structure of the substrate electrodes. Ruthenium oxide electrodes were fabricated using sputter dep... |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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