Ultra-thin uncooled integrable-on-chip detector to measure wide infrared radiation residue in lithography exposure and metrology inspection tools

Autor:	Mojtaba Jahangiri, Jaroslaw Pawluczyk, Karol Dabrowski, Stoyan Nihtianov
Rok vydání:	2023
Zdroj:	Metrology, Inspection, and Process Control XXXVII.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::82b85542a3ca281acb02211d70174041 https://doi.org/10.1117/12.2658316 Zobrazit plný text záznamu